Abstract
PERFORMANCE ANALYSIS OF MEMS MICROHEATER BYOPTIMIZING COIL DESIGN USING COVENTORWARE
Highlights
In past, significant research has been carried out for gas sensing with solid state platforms
With the increase market trend in the area of Internet of Things (IoT) there is a requirement of wide variety of sensors which can be integrated into CMOS platforms
These solid models show a pictorial representation of Mechanical Systems (MEMS) structures and give idea about how the final fabricated device would look like
Summary
Significant research has been carried out for gas sensing with solid state platforms. Semiconducting gas sensing thin film on top of micromachined platform requires an elevated temperature to activate the sensing mechanism. Microheater with fast response and uniform temperature distribution over sensing are of prime concern in case of applications like gas sensing [2]. Researchers have demonstrated sophisticated low power CMOS compatible Micro Mechanical Systems (MEMS) based sensors [2]. To integrate sensors in applications like mobile devices we need platform which give real time fast response. Along with the fast response, the other challenges of gas sensing technologies are high energy consumption and fabrication complexity [3]. We have made an attempt to simulate and analyse microheater for different coil shapes to study the temperature profile for various geometries using CoventorWare and the results are shown in the subsequent sections
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