Abstract
ABSTRACTA hydrothermal method is a unique method to deposit ferroelectric thin films utilizing chemical reaction in solutions. In addition to the low reaction temperature below 200°C, its simple process procedure, automatically aligned polarization and a three-dimensional deposition are advantages. In this study, a lead titanate epitaxial thin film was obtained on a strontium ruthenate bottom electrode sputterd on strontium titanate (100). The highresolution X-ray diffraction mapping showed the film was perfectly c-axis oriented. The transmission electron microscope observation revealed that the film had no lattice dislocation at the interface between lead titanate and strontium ruthenate. A remanent polarization of 96.5μC/cm2 was measured with the single crystal-like DE hysteresis curve. The observation of a scanning nonlinear dielectric microscopy indicated that this film did not contain any defect such as an a-domain and a grain boundary even on the nano scale. With various pulse parameters, nano-domain dots were patterned and the minimum dot radius of inverted domain was 12 nm corresponding to data storage density of 1Tbit/inch2.
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