Abstract
A pentaerythritol tetraacrylate (PETA) microcavity sensor for high performance relative humidity (RH) detection is presented. The fiber tip all-polymer microcavity, with a maximum size of 99.27 µm, consists of a circular truncated cone on the fiber tip end surface and is manufactured by photopolymerization of PETA using two-photon polymerization technology, which is characterized by miniaturization and rapid manufacturing. Experimental results show that its RH sensitivity reaches 108.05 pm/%RH in the range of 14.7–84.3%RH. In particular, respiration monitoring experiments show that its response time and recovery time are 0.55 s and 2.5 s, respectively. The sensor shows the inherent advantages of compact structure, fast response, good repeatability, low hysteresis error, good stability, and high sensitivity. Therefore, it is a promising candidate for potential applications in chemical, medical and biological fields related to RH detection.
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