Abstract
In TFT-LCD industry,PECVD equipment is mainly used for the vapor deposition in the process of Array TFT to produce non-metal film layer,which protects and switches metal circuit.In PECVD process,cavity design is complex and reaction conditions are harsh,the process will lead to bad products,so we need to do pre-maintenance on a regular basis.On the background of PECVD PM,we improved the method and emphatically introduced the cavity check-up leak tool design process because of the time-consuming of PM.We designed a domestic leak detection tool,and applied it into mass producing successfully.Final test results showed that pressure reached to 10 mT in 3min and the leakage rate is 0.45mT/min,which accord with the equipment standard.
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