Abstract
The series of three diamond-like carbon films was fabricated using Plasma – Enhanced Chemical Vapor Deposition setup designed for deposition of amorphous silicon films. The deposited films were analyzed by Spectroscopic ellipsometer Semilab SE-2000 in terms of optical properties. All the measurements were analyzed and modeled by the Fresnel equations. Three parameters were identified: refractive index, extinction index, and thickness. The range of these values indicates that the films can be used as antireflection coatings. The obtained values for n, k, and d are located in ranges: for n - 1.484 and 1621, for k - 0.345 and 0.062, and for d- 136.20 and 74.66.
Highlights
Films as Antireflection CoatingNational Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” Kyiv, Ukraine
Silicon solar cells, ultraviolet radiation detectors and germanium exterior windows of night vision devices are widely used in optoelectronics
It is known that films Amorphous hydrogenated carbon films (a-C):H with a refractive index of more than 2.0 differ in relative transparency in the IR spectral region and are a promising optical material, because of combining properties such as: chemical resistance and mechanical strength
Summary
National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute” Kyiv, Ukraine. V. Bakul Institute for Superhard Materials of the National Academy of Sciences of Ukraine Kyiv, Ukraine. V. Ye. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine Kyiv, Ukraine. The deposited films were analyzed by Spectroscopic ellipsometer Semilab SE-2000 in terms of optical properties. Three parameters were identified: refractive index, extinction index, and thickness. The range of these values indicates that the films can be used as antireflection coatings. The obtained values for n, k, and d are located in ranges: for n - 1.484 and 1621, for k - 0.345 and 0.062, and for d- 136.20 and 74.66. Keywords — DLC film; PECVD method; spectroscopic ellipsometry; antireflection coatings; refractive index
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