Abstract
The analysis of the influence of deposition modes on the structure, electrical and gas sensitivity characteristics of SnO 2 films, deposited by spray pyrolysis, is presented in this report. X-ray diffraction (XRD), scanning electron microscopy (SEM) and laser ellipsometry were used for this purpose. It was determined that nano-size polycrystalline SnO 2 films with thickness >30 nm can have different structure in dependence on pyrolysis temperature and film thickness. Ultra-thin SnO 2 films with thickness d<20 nm are discontinuous. The relation between structure of the films and gas sensitivity properties is discussed. The explanation of observed effects was made.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
