Abstract
Finite Element Modeling of the peculiarities of the trapping energy phenomenon in application to the piezoelectric layered structure (PLS) “Al/(0 0 1) AlN/Mo/(1 0 0) diamond” has been fulfilled. The resonant properties of longitudinal bulk acoustic waves (BAW) as well as frequency dependence of impedance within the 1 – 6 GHz band have been studied. The investigation of distribution of elastic energy flow and elastic displacements in a PLS cross-section allowed us to obtain an important information on energy trapping (ET) in PLS.Experimentally and as a result of modeling, it has been found that Q minimums are observed in PLS at quarter-wave resonance in the thin-film piezoelectric transducer (TFPT). Maximal Q value was observed at half-wave resonance in TFPT.It has been established that the ET-effect depends considerably on the mutual location of the n-th overtone’s antiresonant frequency fa,n and cut-off frequencies of substrate fs,n−k−1 and fs,n−k where fs,n−k−1<fa,n<fs,n−k, and k=0, 1,2,… is the number of half-length waves to be stowed on the thickness of TFPT. The total violation of the ET-effect will be arisen at the condition f >fs,n−k, when the BAW energy excites the symmetrical or antisymmetrical Lamb waves.
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