Abstract
We have studied the most promising material of semiconductor nanotechnology BaTiO3. Barium titanate, a compound of barium and titanate oxides, was studied in three dimensional varieties: in the form of powder with a diameter of 1÷1.5 mm, solid BaTiO3 target with a diameter of 76 mm and thin films obtained by ion-plasma sputtering with a thickness d ≈ 10÷50 nm, on the Si (III) surface. The spectra were recorded at room temperature on an XRD-6100 powder X-ray diffractometer, and spectra were taken from room temperature to 673 K, and the amorphous and crystalline phases of this substance were determined based on the obtained X-ray diffraction spectrograms. The peaks of the spectrogram based on the Miller indices and interplanar distances dhkl show complex compounds that are newly formed on the basis of barium titanate.
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