Abstract
Low resistance ohmic contacts (ρc = 7 x 10-5 Ω-cm2) have been fabricated to Zn-doped p-type InP using an annealed Pd/Zn/Pd/Au metallization. Palladium reacts with InP at low temperatures to form a Pd2InP ternary phase, which is initially amorphous but crystallizes and grows epitaxially on InP. Zinc reacts with some of the overlying Pd to form PdZn (≅250° C), which decomposes at 400-425° C to form PdP2, freeing up Zn to diffuse into Au as well as InP. The contact resistance reaches a minimum as the decomposition reaction takes place. The resultant ohmic contact is laterally uniform and consists of epitaxial Pd2InP adjacent to InP, followed by a thin layer of PdP2 and then the outer Au layer. Further annealing leads to a breakdown of the contact structure,i.e. decomposition of Pd2InP, and an increase in contact resistance.
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