Abstract

采用无电镀Pd的方法,在硅纳米线上制备了一层Pd.首次制备出了能够在室温下工作的Pd/SiNWs肖特基氢气传感器.SEM（Scanning Electron Microscopy）（扫描电子显微镜）表征结果表明,硅纳米线表面Pd层是由Pd纳米颗粒组成.Pd/SiNWs肖特基二极管I-V测试结果表明,该传感器可以在室温下进行氢气（H2）浓度的检测,且可检测的浓度范围很大,同时给出了Pd/SiNWs/p-Si肖特基二极管在常温下进行检测H_2的敏感机理.实验表明,这种新型传感器可以在室温下进行H2检测,且具有很大的发展潜力,可以应用于燃料电池等诸多领域.

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