Abstract

For successful commercialization, Pd-based membranes used for hydrogen purification and separation need stable thermal durability at high temperatures. In order to meet this requirement, Pd–Cu–Ni ternary alloy hydrogen membranes with a saturated surface concentration were fabricated on a 1-in. porous nickel support using high temperature sputtering and Cu-reflow processes. These membranes had considerably enhanced thermal durability because of their thermally stable surface concentration and morphology.

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