Abstract
We investigated the evolution of magnetic property with varying palladium (Pd) contents and elevating substrate temperatures up to 200 <TEX>$^{\circ}C$</TEX> during dc-sputtering. We observed that saturation magnetization (Ms), remanence and anisotropic magnetoresistance (AMR) ratio decrease with Pd contents in the case of keeping the substrate temperature at 3<TEX>$0^{\circ}C$</TEX>. However they increase by adding 2 %Pd, then decrease above 3 %Pd when we keep the substrate temperature at 20<TEX>$0^{\circ}C$</TEX>. Coercivity does not change with Pd contents. Our results imply that we may tune the Ms and AMR with Pd contents and substrate temperature in permalloy films.
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