Abstract
단일모드 광섬유를 이용한 수소센서의 특성을 이론 및 실험으로 분석하였다. 검출 소재로 팔라듐(Pd:palladium) 필름을 이용하였고 광섬유와 Pd 사이의 접착력을 강화하기 위해 니켈(Ni) 필름을 사용하였다. 제작된 센서의 반응감도와 반응시간은 팔라듐 박막의 두께에 크게 의존하였다. 단일모드 광섬유 끝단에 접착층으로 5 nm 두께의 Ni 박막과 감응막으로 10 nm 두께의 Pd가 코팅된 센서는 0.6 dB의 반사도의 변화와 <TEX>$3{\sim}5$</TEX>초의 반응시간을 보였다. The characteristics of the single mode fiber hydrogen sensor have been investigated theoretically and experimentally. Palladium is adopted as a material for the transducer and a thin Ni film is used for the adhesion between the fiber end and the Pd film. It is shown that sensitivity and response time strongly depend on the thickness of Pd film. The single mode fiber sensor coated with 5 nm thick Ni adhesion layer and 10 nm thick Pd transducer layer showed 0.6 dB change of reflectivity and <TEX>$3{\sim}5$</TEX> sec of response time as it absorbed 4% hydrogen gas.
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