Abstract
In this paper, the fabrication of aligned semiconducting single-walled carbon nanotube (SWNT) devices on a thermally grown silicon dioxide (SiO2) over silicon (Si) substrate is presented. The SWNTs are aligned between the nickel fingers that are patterned on the substrate. Subsequently, the fabricated devices are bonded onto a low-cost printed circuit board (PCB) with wire bonder. The mounted sensors have been tested for carbon dioxide (CO2) gas, acetone, and isopropyl alcohol (IPA) vapor sensing at room temperature. The sensitivity values of 27% for the concentration of 15000 ppm of CO2, 52% for the concentration of 7000 ppm of acetone, and 67% for the concentration of 900 ppm of IPA have been observed with good response and recovery times. The fabricated sensors show better performance than the already reported sensors.
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