Abstract
To observe the effect of excitation coil pitch on the micro fluxgate magnetic sensor, two sensors are fabricated using multi layer board process and the pitch distance of excitation coil are and , respectively. The fluxgate sensor consists of five PCB stack layers including one layer of magnetic core and four layers of excitation and pick-up coils. The center layer as magnetic core is made of a Co-based amorphous magnetic ribbon with extremely high DC permeability of and has a rectangular-ring shape to minimize the magnetic flux leakage. Four outer layers as excitation and pick-up coils have a planar solenoid structure and are made of copper foil. In case of the fluxgate sensor having the excitation coil pitch of , excellent linear response over the range of to is obtained with sensitivity of 780 V/T at excitation sine wave of and 360 kHz. The chip size of the fabricated sensing element is . The very low power consumption of is measured. This magnetic sensor is very useful for various applications such as: portable navigation systems, telematics, VR game and so on.
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