Abstract

We study positive bias temperature instability/negative bias temperature instability (PBTI/NBTI)-related aging-dependent statistical variability (SV) in 32-nm thin-body silicon-on-insulator (TB-SOI) and 22-nm double-gate (DG) MOSFETs using comprehensive 3-D numerical simulation. Results indicate that a high degree of PBTI/NBTI degradation can introduce a similar level of SV as the variability in the initial ?virgin? devices introduced by random discrete dopants and line edge roughness. Simulations have shown that the TB-SOI and the DG MOSFETs have different susceptibilities to PBTI/NBTI-induced variability.

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