Abstract
We report a thin PVDF–TrFE (polyvinyledenedifluoride–trifluoroethylene) copolymer film pressure sensor, fabricated using standard lithography process for cost-effective batch process, film uniformity, and high resolution of polymer patterning. PVDF–TrFE copolymer, a semi-crystalline material, was spin-coated into thin films (1μm thick) to tap the near β-phase formation. Pressure measurements demonstrated that the thin film (1μm) show better performance compared to thick film (6μm) with no electrical poling or mechanical stretching. Thin film devices showed higher β phase formation from Raman spectroscopy measurements, which translate into high piezoelectricity for sensing. The sensors can operate over a broad pressure range of 0–300mmHg, with fast recovery time of 0.17s, suitable for real time flow measurements in catheter applications.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
