Abstract
We report a thin PVDF–TrFE (polyvinyledenedifluoride–trifluoroethylene) copolymer film pressure sensor, fabricated using standard lithography process for cost-effective batch process, film uniformity, and high resolution of polymer patterning. PVDF–TrFE copolymer, a semi-crystalline material, was spin-coated into thin films (1μm thick) to tap the near β-phase formation. Pressure measurements demonstrated that the thin film (1μm) show better performance compared to thick film (6μm) with no electrical poling or mechanical stretching. Thin film devices showed higher β phase formation from Raman spectroscopy measurements, which translate into high piezoelectricity for sensing. The sensors can operate over a broad pressure range of 0–300mmHg, with fast recovery time of 0.17s, suitable for real time flow measurements in catheter applications.
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