Abstract
The micropatterning of lithium niobate (LiNbO3) thin films was conducted by applying a photolithographic technique to an aqueous precursor solution that was derived from a double alkoxide. The neutralization process of the alkaline lithium niobium hydroxide solution was essential to avoid the dissolution of the aluminum masking pattern on the sapphire substrate. The acetic acid was a suitable neutralizer to form the stoichiometric and transparent gel film. The gel film that was prepared from a neutralized precursor solution at pH 6.4 gave high‐quality crystalline LiNbO3 films after heat treatment at 500°C.
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