Abstract
This paper reports the fabrication process and characterization of a flexible pressure sensor based on polydimethylsiloxane (PDMS) and multi-walled carbon nanotubes (CNT-PDMS). The proposed approach relies on patterned CNT-PDMS nanocomposite strain gauges fabricated with SU-8 microstructures (with the micropatterns) in a low-cost and simple fabrication process. This nanocomposite polymer is mounted over a PDMS membrane, which, in turn, lies on top of a PDMS diaphragm like structure. This configuration enables the PDMS membrane to bend when pressure is applied, thereby affecting the nanocomposite strain gauges, effectively changing their electrical resistance. Carbon nanotubes have several advantages such as excellent mechanical properties, high electrical conductivity and thermal stability. Furthermore, the measurement range of the proposed sensor can be adapted according to the application by varying the CNTs content and geometry of microstructure. In addition, the sensor's biocompatibility, low cost and simple fabrication makes it very appealing for biomechanical strain sensing. The sensor's sensitivity was about 0.073%ΔR/mmHg.
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