Abstract

Electron microdiffraction from regions less than 20Å, and as small as 3Å, in diameter are now readily obtained with a dedicated STEM instrument, especially if an efficient two dimensional detector system is employed. Such patterns may be valuable for detailed studies of small particles, individual crystal defects and small ordered regions within microcrystalline or amorphous materials. A difficulty which often arises in the use of microdiffraction patterns is that of determining to what extent a pattern or collection of patterns is representative of the material under study. For example, for a thin amorphous film, the recording of one pattern showing a well-developed regular array of spots is not significant since the randomness of the structure ensures that any such a pattern will occur with some finite probability. To characterize the nature and extent of the local atomic ordering, statistical analysis of a very large number of patterns would be required.

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