Path planning of micromanipulators inside an SEM and 3D nanomanipulation of CNTs for nanodevice construction

Abstract

The concept of a nano-laboratory inside an SEM involves performing a sequence of tasks in a continuous pattern. Robotic systems with nanoscale motion resolution facilitate in-situ manipulation and characterization of nanomaterials to assemble nanodevices inside SEMs. Precise motion control of micromanipulators is required at both macro and micro-nano scales to effectively execute multiple sequential experimental tasks in nanofabrication. However, managing the entire nanomanipulation setup is challenging due to the constricted workspace inside an SEM and the lack of proper process feedback information at that scale. This study explores the application of path planning algorithms to generate a collision-free motion path for the micromanipulators operating within the confined space of an SEM. A MATLAB-based computational tool is first developed using PRM and Dijkstra's path planning algorithms. Considering environmental constraints, the program generates an optimal motion path for the micromanipulators, facilitating automatic configuration changes within the SEM chamber. It ensures a seamless workflow and facilitates the smooth integration of additional experimental tools within the existing setup. Manipulation strategies using the nanorobotic setup are established based on the application of the developed path planning module. A pick-and-place 3D nanomanipulation technique of CNTs using cooperative control of dual micromanipulators has been demonstrated for nanodevice construction. Additionally, the electrical response of individually manipulated CNTs is recorded using a two-probe measurement technique.