Abstract
A silicon device to simplify the coupling of multiple single-mode fibers to embedded single-mode waveguides has been developed. The silicon device features alignment structures that enable a passive alignment of fibers to integrated waveguides. For passive alignment, precisely machined V-grooves on a silicon device are used and the planar lightwave circuit board features high-precision structures acting as a mechanical stop. The approach has been tested for up to eight fiber-to-waveguide connections. The alignment approach, the design, and the fabrication of the silicon device as well as the assembly process are presented. The characterization of the fiber-to-waveguide link reveals total coupling losses of (0.45±0.20 dB) per coupling interface, which is significantly lower than the values reported in earlier works. Subsequent climate tests reveal that the coupling losses remain stable during thermal cycling but increases significantly during an 85°C/85 Rh-test. All applied fabrication and bonding steps have been performed using standard MOEMS fabrication and packaging processes.
Highlights
A large number of active and passive optical components can be realized using integrated waveguides or planar lightwave circuits (PLCs) in a very compact fashion
The lateral deviation of the silicon device to the alignment structures is in the range of about 1 μm or less
One can observe that the device is closely attached to the waveguide board without a gap between the bottom cladding and the devices surface (Fig. 8)
Summary
A large number of active and passive optical components (e.g., beam-splitters and multiplexers) can be realized using integrated waveguides or planar lightwave circuits (PLCs) in a very compact fashion. Waveguide structures are used as an aligning element centering a fiber in front of a waveguide core.[2] multifiber connections have been reported with an mechanical transfer-connector inspired approach, using guiding pins to realize passive alignment.[3,4] For multifiber single-mode coupling, mainly fiber arrays in a glass substrate are actively aligned to the PLC and attached by adhesive bonding. Kraehenbuehl et al.[5] presented a method for single-channel coupling, based on silicon V-grooves and integrated alignment structures on the waveguide board to realize a passive alignment of single-mode waveguides and fibers Their approach integrates a ferrule to attach a connector directly to the waveguide board.
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