Passive vibration suppression method based on frequency domain analysis in white light vertical scanning interferometer

Abstract

Vibration in manufacturing environment can significantly affects the accuracy of surface measurements, especially for the white light vertical scanning interferometry (VSI), which requires mechanical scanning for full-field measurements. This paper proposes a passive vibration suppression technique that integrates a second common-path interferometer and uses frequency domain analysis to measure vibration and reconstruct surface topography. The method is feasible for suppressing vibrations with different frequencies and amplitudes, as verified by simulation and signal recovery analysis. An in-house developed interferometer with a common optical path is used to demonstrate the measurement performance experimentally. The mathematical formula relating the vibration amplitude, the vibration frequency, the frame rate of the camera and the scanning interval is presented. The experimental results show that the precision of plane measurement decreases with increasing vibration amplitude and frequency. Moreover, the step sample signals under a maximum vibration condition of 400 nm/5 Hz are recovered, with a standard deviation of 26.07 nm for the step height measurement. As the scanning interval increases, the system can suppress higher-amplitude vibrations.