Abstract
We present a passive vibration compensation approach in scanning white-light interferometry (SWLI). A pointwise distance measuring interferometer (DMI) obtains fast temporal distance changes during the white-light depth-scan of an aerial-measuring Michelson white-light interferometer for topography measurement. Both interferometers share a part of the optical path so that the measurement spot of the DMI is within the field of view of SWLI. With the real positions of the interferometer with respect to the measuring object during the depth scan known from DMI measurements, we can compensate for the influence of unintentional distance changes caused by environmental vibrations or scanner nonlinearities. By reordering of the captured image frames and improved correlogram interpolation, we are able to reconstruct correct signals from completely distorted (and unusable) SWLI signals. Although the basic idea of the system already has been published, we improved the signal reconstruction technique so that the specimen's topography measurement can be obtained with the same accuracy as without any vibrations or scan distortions influence. In addition, we demonstrate the feasibility of the approach by different practical measurements with and without vibrations.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
