Abstract
A tunable passive circuit is introduced for radio frequency (rf) filtering of Langmuir probes used to measure plasma properties. The circuit produces a high impedance between the probe tip and ground so that the probe tip follows potential fluctuations in the plasma so that the probe bias voltage with respect to the plasma is constant on the time scale of rf fluctuations. Filtering is implemented at the fundamental frequency (13.56 MHz in this case) and the second and third harmonics. Representative probe traces and electron energy distribution functions from an inductively coupled plasma are presented to demonstrate filter performance.
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