Abstract
A robust fabrication method for stable mesoporous silicon membranes using standard microfabrication techniques is presented. The porous silicon membranes were passivated through the atomic layer deposition of different metal oxides, namely aluminium oxide Al2O3, hafnium oxide HfO2 and titanium oxide TiO2. The fabricated membranes were characterized in terms of morphology, optical properties and chemical properties. Stability tests and optical probing noise level determination were also performed. Preliminary results using an Al2O3 passivated membranes for a biosensing application are also presented for selective optical detection of Bacillus cereus bacterial lysate. The biosensor was able to detect the bacterial lysate, with an initial bacteria concentration of 106 colony forming units per mL (CFU/mL), in less than 10 min.
Highlights
Porous silicon (PSi) is a promising material for many applications, the most popular being the fields of diagnostics, therapeutics and photonics [1,2,3,4]
After their fabrication process and passivation, the membranes were characterized by Scanning Electron Microscopy (SEM) and spectroscopic liquid infiltration method (SLIM), in order to determine their thickness, porosity, optical properties and pore morphology
To illustrate the use of Atomic layer deposition (ALD) passivated membranes, optical detections of B. cereus bacterial lysate were performed as described by Vercauteren et al [21]
Summary
Porous silicon (PSi) is a promising material for many applications, the most popular being the fields of diagnostics, therapeutics and photonics [1,2,3,4]. PSi is obtained through nanostructuration of bulk silicon substrate via electrochemical etching [5]. This process allows to obtain a high surface area (up to 800 m2 /g) [6] and a versatile surface that can be chemically modified and tuned for different applications. Membranes can be obtained from PSi by detaching the porous layer from the underlying bulk silicon substrate. The formation of this permeable barrier helps to overcome the infiltration limitations of close-ended PSi and extends its application to different fields, such as flow-through optical detection, drug delivery, microfluidics, energy conversion and electronics [8]
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