Particle swarm approach to the optimisation of trenched cantilever‐based MEMS piezoelectric energy harvesters

Abstract

A micro-electro-mechanical system (MEMS) trenched piezoelectric energy harvester based on a cantilever structure has been proposed. The trenched piezoelectric layer has increased the output voltage and the generated power. It also provides three additional design parameters such as the trench position, depth and length. A particle swarm approach has been used for optimisation of the piezoelectric energy harvester geometry with the aim of finding the optimum design which transfers the maximum harvested power to a definite load. The optimisations and comparisons have been made for unimorph, bimorph, trenched and non-trenched cantilever beams. The results are quite revealing that the generated power for a trenched bimorph energy harvester is much larger than other structures. The optimum design found by particle swarm optimisation algorithm has asymmetric trenches in the top and bottom piezoelectric layers and can generate much more power than the unoptimised structure.