Abstract
The basic physics that governs the interaction of energetic ion beams with solids has its roots in the atomic and nuclear physics of the last century. The central formalism of Jens Lindhard, describing the “particle–solid interaction”, provides a valuable quantitative guide to statistically meaningful quantities such as energy loss, ranges, range straggling, channeling effects, sputtering coefficients, and damage intensity and profiles. Modern materials modification (nanoscience, solid state dynamics) requires atomic scale control of the particle–solid interaction. Two recent experimental examples are discussed: (1) the control of the size distribution of nanocrystals formed in implanted materials and (2) the investigation of the site-specific implantation of hydrogen into silicon. Both cases illustrate unique solid-state configurations, created by ion implantation, that address issues of current materials science interest.
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