Abstract
Abstract In the paper experimental and numerical results for a simple particle micromanipulator fabricated in silicon technology are presented. It consists of three orthogonal liquid filled channels above meander-shaped planar electrode strips. By applying appropriate alternating, rotating or travelling electric fields in the chamber dielectric forces acting on particles suspended in the liquid are induced allowing trapping, movement and separation of them. The efficient manipulation of small particles with typical dimensions of several micrometers using electrogradient techniques (EGT) requires electrode structures of the same size. Due to the complex electrode geometry a numerical procedure is used for calculation of particle trajectories and optimising the design. In the micro range small fabrication defects are likely to cause large changes of the properties of the manipulator. Therefore, a test procedure based on electrode processes in aqueous media and the pH-dependent fluorescence intensity of a marker solution which enabled us to visualise the working states, surface coatings and fabrication defects of microstructured electrodes via a microscope is introduced.
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