Abstract
The structure of molecular oxygen discharge generated by a capacitively coupled reactor was experimentally investigated using a Langmuir probe and the results were compared to the Particle-in-Cell (PIC) simulation. The electron energy distribution functions (EEDF) were measured for a pressure range of 10 to 100 mTorr, keeping the power injected into the plasma at about 50 and 200W. The simulation calculated the EEDFs taking into account three main charged particle species presented in oxygen plasma: electron, O- and O2+. The PIC simulation gives the specie profiles; however is time-consuming for discharges with many species such as oxygen discharges. Despite that, the order of magnitude is the same as the experimental data. The simulation results show that the cold and hot electron temperatures are in a good agreement with the experimental data. Moreover, the results indicate that the EEDFs measured at lower pressures are bi-Maxwellian distributions.
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