Abstract
Abstract Ultra fast laser processing is marketed for processes which require small thermal impact to the product. The process has its advantages in processing speed and quality. Recent applications have been in photo-voltaic processing, surface treatment or preparation of electrodes for lithium ion batteries. As soon as the fast laser is utilized for ablation, particles are generated. Driven by product quality, tool conservation and governmental restrictions a well-defined air filter is necessary for laser processes. The layout and design of such a filter system is not strait forward. First of all acquisition plays a major role on the overall quality of the system. In addition the filter itself needs to be well defined in terms of deposition rate and endurance. The latter is determined by the generated particles. We present an investigation of particles as generated by ultra fast laser processing of silicon, inox and ceramics. Our investigation proves thermal impact on generated particles by the ultra-fast laser. The particle spectrum is clearly determined by sub micrometer particles, making nano-filtration a necessary step. Based on this investigation an extraction and filter solution was designed and successfully demonstrated on silicon, inox and ceramic process. A filter quality according to governmental regulation is achieved, based on an extraction which delivers best product quality.
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