Particle energy distributions and metastable atoms in transient low pressure interpulse microwave plasma

Abstract

The electron energies and its distribution function are measured in non-equilibrium transient pulsed microwave plasmas in the interpulse regime using a retarding field electron energy analyzer. The plasmas are driven to different initial conditions by varying the electromagnetic (EM) wave pulse duration, peak power, or the wave frequency. Two cases of wave excitation are investigated: (i) short-pulse (pulse duration, tw ~ 1 μs), high-power (~60 kW) waves of 9.45 GHz and (ii) medium-pulse (tw ~ 20 μs), and moderate power waves of ~3 kW at 2.45 GHz. It is found that high-power, short-duration pulses lead to a significantly different electron energy probability function (EEPF) in the interpulse phase—a Maxwellian with a bump on the tail, although the average energy per pulse (~60 mJ) is maintained the same in the two modes of wave excitation. Electrons with energies >250 eV are found to exist in the discharge in the both cases. Another subset of experiments is performed to delineate the effect of the wave frequency and the peak power on EEPF. A traveling wave tube (TWT) amplifier based microwave source for generating pulsed plasma (tw = 230 μs) in a wide frequency range (6–18 GHz) is employed for this purpose. Further experiments on measurements of metastable density using optical emission spectroscopy and ion energy analyzer have been carried out. By tailoring the EEPF of the transient plasma and metastable densities, new applications in plasma processing, chemistry and biology can be realized in the interpulse phase of the discharge.