Abstract
Particle emission rates measured from ultra-high purity, cleanroom gas handling components following the test procedures specified in the SEMATECH test methods are described. A condensation nucleus particle counter (CNC) having a counting efficiency of 50 percent at 0.02 μm in diameter was used to measure the total particle contribution from the gas handling components. A spool piece was inserted to measure the baseline particle concentration of the test stand before the measurement of the test component was carried out. Eighteen test samples, six each from three suppliers (two domestic and one foreign), in each type of gas handling components (valves, point-of-use filters, pressure regulators), were tested using the revised test method. Particle contribution data obtained for fresh out-of-the-bag, stainless steel (SS) test samples, 1/4-in. in OD, from different manufacturers are summarized in this paper.
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