Abstract
Optical projection printing is quantitatively studied, using the diffracted image of two bars of equal width and space and an aspect ratio of three. Hopkins' four-dimensional integral for partially coherent imaging is used for the numerical analysis. Diffraction-limited lenses with a circular pupil are used. Constant intensity profiles in an absorptionless photoresist and nonreflective substrate are evaluated. Then the tolerances ot defocus and intensity are derived using a linewidth tolerance of ±2.5 percent of the mask linewidth which varies from 0.5, 0.75, 1, 1.5, 2, to 2.5 µm. The illuminations used have σ = 0, 0.5, 0.7, 0.78, 1, 1.3, and infinity.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
