Abstract

Stepping piezoelectric actuators have achieved significant improvements to satisfy the urgent demands on precision positioning with the capability of long working stroke, high accuracy and micro/nano-scale resolution, coupled with the merits of fast response and high stiffness. Among them, inchworm type, friction-inertia type, and parasitic type are three main types of stepping piezoelectric actuators. This chapter is aimed to introduce the basic definition and typical features of the parasitic motion principle (PMP), followed by summarizing the recent developments and achievements of PMP piezoelectric actuators. The emphasis of this chapter includes three key points, the structural optimization, output characteristic analysis and performance enhancement. Finally, the current existing issues and some potential research topics in the future are discussed. It is expected that this chapter can assist relevant researchers to understand the basic principle and recent development of PMP piezoelectric actuators.

Highlights

  • Nowadays, long working stroke precision positioning systems with micro-to-nano resolution are significantly demanded in many scientific studies and industrial fields [1–3]

  • Most of the conventional actuators can hardly satisfy the requirements on positioning resolution for precision positioning systems, such as hydro-motors, direct/alternating current motors, pneumatic elements, et al, even with the merits of large output capability, fast response, and long working stroke [4–6]

  • Various of piezoelectric-driven positioning systems with flexure hinge-based compliant mechanisms have been developed and widely applied in many scientific and industrial applications, such as atomic force microscopy (AFM) [11–13], fast tool servo (FTS) single-point diamond turning [14–16] and optical adaptive mirror [17–19], et al Generally, restricted by the inverse piezoelectric effect of current piezoelectric materials, the displacement of a single piezoelectric element is limited within tens of nanometers to several micrometers [20]

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Summary

Introduction

Long working stroke precision positioning systems with micro-to-nano resolution are significantly demanded in many scientific studies and industrial fields [1–3]. Various of piezoelectric-driven positioning systems with flexure hinge-based compliant mechanisms have been developed and widely applied in many scientific and industrial applications, such as atomic force microscopy (AFM) [11–13], fast tool servo (FTS) single-point diamond turning [14–16] and optical adaptive mirror [17–19], et al Generally, restricted by the inverse piezoelectric effect of current piezoelectric materials, the displacement of a single piezoelectric element is limited within tens of nanometers to several micrometers [20]. The applications of such positioning stages are only employed within limited scopes due to micro-scale working stroke. The purpose of this chapter is to introduce the basic parasitic motion principle, review the developments and achievements in recent years, and point out some potential issues and current challenges in this research

Introduction to the parasitic motion principle
Developments and achievements
Issues and future directions
Findings
Conclusions
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