Parametrization of a tabletop micro‐XRF system

Abstract

A table‐top micro X‐ray fluorescence apparatus composed of a conventional X‐ray tube with a polycapillary lens and a silicon drift X‐ray detector was parametrized according to an independent parameter approach. The tube bremsstrahlung spectrum was calculated from the Bethe‐Heitler equation, convoluted by the energy distribution of radiating electrons in the target. In this paper, we propose a simple analytical approximation for this energy distribution. An analytical approximation is also proposed for transmission of the lens composed of curved capillaries.