Parametric study of radiofrequency helium discharge under atmospheric pressure

Abstract

The parameters of radiofrequency helium discharge under atmospheric pressure were studied by electrical and optical measurements using high voltage probe, current probe and optical emission spectroscopy. Two discharge modes α and γ were observed within certain limits. During α to γ mode transition, a decrease in voltage (280–168 V), current (2.05–1.61 A) and phase angle (76∘–56∘) occurred. The discharge parameters such as resistance, reactance, sheath thickness, electron density, excitation temperature and gas temperature were assessed by electrical measurements using equivalent circuit model and optical emission spectroscopy. In α mode, the discharge current increased from 1.17 to 2.05 A, electron density increased from 0.19 × 1012 to 0.47 × 1012 cm−3 while sheath thickness decreased from 0.40 to 0.25 mm. The excitation temperatures in the α and γ modes were 3266 and 4500 K respectively, evaluated by Boltzmann’s plot method. The estimated gas temperature increased from 335 K in the α mode to 485 K in the γ mode, suggesting that the radiofrequency atmospheric pressure helium discharge can be used for surface treatment applications.