Parametric study of atmospheric-pressure single-walled carbon nanotubes growth by ferrocene–ethanol mist CVD

Abstract

Uniform web-like films consisting single-walled carbon nanotubes (SWCNTs) were deposited on a silicon substrate using the chemical vapor deposition (CVD) of ferrocene–ethanol mist at atmospheric pressure (∼ 1 atm). The tiny mist was generated using a high-frequency ultrasonic vibration. The effects of various parameters including deposition position in the reactor, temperature, ferrocene/ethanol ratio, flow rate of carrier gas (argon), and deposition time on the formation of SWCNTs was investigated using high-resolution scanning electron microscopy, transmission electron microscopy and Raman spectroscopy. The worm region outside the furnace was found to be a suitable position for the formation of SWCNT films. The furnace temperature and the flow rate of carrier gas were found to determine the diameter and crystallinity of nanotube. The ferrocene concentration in ethanol strongly influenced the amount of impurity particles in the material. Moreover, the intensity of metallic tail in D-band was found to decrease with increasing the flow rate, showing a possibility of the formation of semiconducting SWCNTs. Results of this study can be used to improve understanding of the growth of SWCNTs by floating catalyst CVD of alcohol mist.