Abstract
A 40W Nd:YAG laser has been used to carry out parametric study the etching depth (ablation depth) for different optical glasses using stainless steel, brass and silver as target materials by Laser Induced Plasma Assisted Ablation (LIPAA) process. A maximum ablation depth of 38m for fused quartz has been achieved with stainless steel as target material with a high ablation rate of 565nm/pulse. A surface roughness of 120nm has been measured for fused quartz with stainless steel as target.
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