Parametric Model Identification of Axisymmetric MEMS Resonators

Abstract

This paper proposes a technique for developing parametric models of modally degenerate resonators from stimulus-response data. The technique complements traditional empirical frequency response estimates that are commonly used for testing MEMS resonators, however, the parametric models have distinct advantages when the modal frequency differences are close enough to frustrate estimates of quality factors, natural frequencies and mode orientations. The proposed technique also completely rejects parasitic coupling between the stimulus and pick-off electrodes. It is shown how a modification of the algorithm using demodulated measurement signals greatly reduces storage and computational requirements. [2020-0281]