Abstract
Parametric resonances in a repulsive-force MEMS resonator are investigated. The repulsive force is generated through electrostatic fringe fields that arise from a specific electrode configuration. Because of the nature of the electrostatic force, parametric resonance occurs in this system and is predicted using Mathieu’s Equation. Governing equations of motion are solved using numerical shooting techniques and show both parametric and subharmonic resonance at twice the natural frequency. The primary instability tongue for parametric resonance is also mapped. This is of particular interest for MEMS sensors that require high signal-to-noise ratios due to the large oscillation amplitudes associated with parametric resonance.
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