Abstract
MEMS Gyroscope mathematical model is needed while an electric-optical control system is designed, because MEMS gyroscope is used as angular rate component and its error is also added into the servo loop. To compose the mathematical model, three parameters, damping ratio, scale factor and natural frequency are identified. First a gyroscope mathematical model is presented. Second a MEMS gyroscope is selected to be tested according to the particular standard to get the above mentioned three parameters and the gyroscope frequency response characteristics. Third with the identified parameters, a whole gyroscope mathematical model is composed. Finally, the mathematical model frequency response characteristics is compared to the tested frequency response characteristics. The tested parameters result is that the damping ratio is 0.7149, the bandwidth is 122Hz and the scale factor is 8mv/°/s. In the gyroscope bandwidth, the compared result is that the maximum magnitude attenuation error is 0.98dB while the maximum phase lag error is 0.88°. It is concluded that the three parameters attach to the mathematical model are conveniently tested and the model is easily to be composed. The composed mathematical model frequency characteristics is almost same with the tested frequency characteristics. The model is helpful to the designation the electric-optical servo system.
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