Abstract
Purpose – The purpose of this paper is to demonstrate the influence of material properties and fabrication technique on the performance of an embedded pressure sensor. Based on conducted theoretical analysis a suitable material and technological technique that gave the best behavior of designed sensor was chosen for its fabrication. This is verified on the example of a resonant pressure sensor, designed for operation in the MHz range.Design/methodology/approach – A sensor module is fabricated using the low temperature co‐fired ceramics (LTCC) technology and sputtering technique for electrodes deposition. The module comprises an inductor connected with a variable capacitor formed by the sensor membranes in a parallel LC circuit. An extensive parallel analysis of sensors performance for sensors with thick film (screen‐printed) and thin film (sputtered) electrodes is demonstrated. Mechanical and electrical parameters (Young's modulus and permittivity) of different tape materials that are considered for senso...
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