Abstract

In this paper, to fully understand the influence of nanofabrication error issues on the lithium-niobate-based device, the systematic simulations and optimizations of lithium-niobate-based photonic crystal (PhC) optomechanical cavity considering the material dispersion and inclination angle of PhC air hole are investigated in details. The structural parameter influences on the PhC band gap, the line defected waveguide transmission characteristics, the optical resonant wavelength of the PhC microcavity, and the mechanical resonant frequency are all discussed. The effects of the simulation methods on the PhC band gap are investigated as well. And finally, the opto-mechanical coupling rate of the lithium-niobate-based PhC optomechanical cavity structure is calculated. Such obtained results can help researchers to precisely design the required optomechanical cavity for specific applications.

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