Abstract
The accuracy of micro-electro-mechanical systems (MEMS) gyroscopes is sensitive to variations of the drive mode resonance frequency ω0. To tackle this problem, we propose an H∞ control, which explicitly depends on ω0 and guarantees, with reduced conservatism, a specified level of performance of the drive mode. We consider the design of continuous- and discrete-time controllers. We then propose a method based on the µ-analysis to validate the performance of drive mode control even if the frequency ω0 is not perfectly measured. Numerical examples confirm the effectiveness of our approach.
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