Abstract
We have fabricated planar parabolic refractive X-ray lenses made of quartz glass for high-energy X-ray focusing by optical lithography and dry etching techniques. We succeeded in 100-µm-deep etching, realizing highly efficient microfocusing for high-energy X-rays. We measured the size and photon flux of the X-rays focused by two lenses with a crossed geometry at BL13XU of SPring-8. High-flux (more than 2 × 109 photons/s) microbeams with 25 and 30 keV X-rays were successfully obtained.
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