Abstract
AbstractIn this report, the new production line for organic light‐emitting diode (OLED) display to overcome hurdles in OLED TV production is described. Instead of conventional cluster system, we adopted in‐line system with linear nozzle source (LNS), gluon chuck, and speed buffer (SB) system. The thickness uniformities of organic layers evaporated are well controlled within 3% over the area of 2200 × 2500 mm2. The glass was horizontally moved from chuck chamber to dechuck chamber by gluon chuck with glass sagging less than 3 mm. Using SB systems, the distance between masks can be controlled by 10 mm. The efficiency of the system is obtained about 60%. Most effective in‐line system is developed and applied to the mass production of OLED TV.
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