Abstract
Ar + laser radiation (CW, 488 nm) is used to induce deposition of palladium (Pd) thin films onto polyimide surfaces from palladium–amine {[Pd(NH 3) 4] 2+} solutions. The chemical reaction is carried out by formaldehyde-assisted reduction of palladium–amine complex molecules to metallic Pd, and is localized on the polymer substrate by a focused and scanned Ar + laser beam. The narrow (6–14 μm), homogeneous and thin (<50 nm) palladium patterns are found to be excellent catalysts for further copper autocatalytic electroless deposition. Both the Pd and Cu layers are characterized by scanning electron microscopy (equipped with EDAX), a DEKTAK profiler and resistivity measurements.
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