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Abstract
Palladium films on porous alumina supports were prepared by the chemical vapor deposition (CVD) technique of reducing PdCl 2 with hydrogen. The phase composition and morphology of Pd composite membranes were analyzed using X-ray diffraction (XRD), scanning electron microscopy (SEM) and scanning tunnelling microscopy (STM). A well-crystallized palladium layer was deposited on porous α-alumina supports. The thickness and grain size of the palladium layer were estimated to be about 4 μm. The palladium grains consisted of columnar crystallites of 20–40 nm in length and 5–8 nm in width. The penetration depth of palladium into the α-alumina support was as large as 20 μm. An opposite-diffusion CVD technique is suggested for preparing a dense, thin palladium membrane with high hydrogen permeability and good mechanical stability.
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